WIDE BANDGAP SEMICONDUCTOR DEVICE

摘要

A wide bandgap semiconductor device includes a first conductive type high-concentration wide bandgap semiconductor substrate, a first conductive type low-concentration wide bandgap semiconductor deposited film which is formed on the semiconductor substrate, a metal film which is formed on the semiconductor deposited film so that a Schottoky interface region is formed between the metal film and the semiconductor deposited film, and a second conductive type region which is formed in a region of the semiconductor deposited film corresponding to a peripheral portion of the metal film, wherein the Schottoky interface region in the semiconductor deposited film is surrounded by the second conductive type region so that periodic island regions are formed in the Schottoky interface region.

主权项

1. A wide bandgap semiconductor device, comprising:
a first conductive type high-concentration wide bandgap semiconductor substrate; a first conductive type low-concentration wide bandgap semiconductor deposited film which is formed on the first conductive type high-concentration wide bandgap semiconductor substrate; a metal film which is formed on the first conductive type low-concentration wide bandgap semiconductor deposited film so that a Schottoky interface region is formed between the metal film and the first conductive type low-concentration wide bandgap semiconductor deposited film; and a second conductive type region which is formed in a region of the first conductive type low-concentration wide bandgap semiconductor deposited film corresponding to a peripheral portion of the metal film; wherein the Schottoky interface region in the first conductive type low-concentration wide bandgap semiconductor deposited film is surrounded by the second conductive type region so that periodic island regions are formed in the Schottoky interface region; the relation S2×N2≧S1×N1 is established when S1 designates a contact area between the metal film and the island regions, N1 designates an impurity concentration of the first conductive type low-concentration wide bandgap semiconductor deposited film, S2 designates a contact area between the metal film and the second conductive type region and N2 designates an impurity concentration of the second conductive type region; and a width of each of the island regions is not shorter than 1 μm and not longer than 4 μm.