发明名称 Semiconductor Device and Manufacturing Method Thereof
摘要 An object is to obtain a semiconductor device with improved characteristics by reducing contact resistance of a semiconductor film with electrodes or wirings, and improving coverage of the semiconductor film and the electrodes or wirings. The present invention relates to a semiconductor device including a gate electrode over a substrate, a gate insulating film over the gate electrode, a first source or drain electrode over the gate insulating film, an island-shaped semiconductor film over the first source or drain electrode, and a second source or drain electrode over the island-shaped semiconductor film and the first source or drain electrode. Further, the second source or drain electrode is in contact with the first source or drain electrode, and the island-shaped semiconductor film is sandwiched between the first source or drain electrode and the second source or drain electrode. Moreover, the present invention relates to a manufacturing method of the semiconductor device.
申请公布号 US2014326998(A1) 申请公布日期 2014.11.06
申请号 US201414334099 申请日期 2014.07.17
申请人 Semiconductor Energy Laboratory Co., Ltd. 发明人 Honda Tatsuya
分类号 H01L29/786 主分类号 H01L29/786
代理机构 代理人
主权项 1. (canceled)
地址 Kanagawa-ken JP