Li-CONTAINING OXIDE TARGET ASSEMBLY

摘要

Provided is a Li-containing oxide target assembly which is produced by bonding a Li-containing oxide sputtering target to an Al-based or Cu-based backing plate through a bonding material, and which does not undergo the occurrence of warpage or breakage during the bonding. The Li-containing oxide target assembly according to the present invention is produced by bonding a Li-containing oxide sputtering target to a backing plate through a bonding material, and has bending strength of 20 MPa or more.