| 摘要 |
PROBLEM TO BE SOLVED: To provide an ion milling apparatus in which the impact of redeposition on a cathode is suppressed while facilitating the control of an ion current under a low acceleration voltage. SOLUTION: The ion milling apparatus comprises an anode placed in an ion gun and applied with a positive voltage, and a cathode which generates ions when a potential difference is generated between the cathode and the anode. The cathode has an aperture which divides the pressure of a space to which a gas is supplied by a gas supply source, and a space on the side of a specimen irradiated with the ions, and passes the ions. An acceleration electrode for accelerating the ions passed through the aperture is also provided. COPYRIGHT: (C)2012,JPO&INPIT |
