| 摘要 |
A method of manufacturing an overheat or fire alarm detection system, comprises the steps of micromachining a pressure sensor 10 and securing a sensor tube (20, Fig. 2) in fluid communication with the pressure sensor 10. The sensor tube may comprise a hollow tube (24, Fig. 2) containing a material that evolves gas upon heating. The micromachining step may comprise doping at least a portion 13 of a first layer 12, forming a cavity 19 at least partially within the doped portion 13 and forming a deformable diaphragm 14 over the cavity. |
