| 摘要 |
PROBLEM TO BE SOLVED: To provide a scheduler that generates not only a normal substrate transferring schedule for a newly-supplied substrate, but also a substrate transferring schedule for keeping a large production quantity even if a failure occurs, a substrate treatment apparatus using the scheduler, and a method for operating the substrate treatment apparatus. SOLUTION: The scheduler is embedded in a control device of the substrate treatment apparatus which includes a plurality of substrate treatment sections for treating substrates, transfer sections for transferring the substrates, and the control device for controlling the transfer of the substrates at the transfer sections and controlling substrate treatment at the substrate treatment sections, and calculates the schedule of the transfer of the substrates. The scheduler also has a function which successively calculates the substrate transfer schedule for the newly-supplied substrate, and when the fault occurs in the apparatus, recalculates the substrate transferring schedule with the fault-occurrence state as an initial state. COPYRIGHT: (C)2011,JPO&INPIT |
