发明名称 3D電子モジュールをビアにより垂直に相互接続する方法
摘要 <p>The method involves stacking wafers (1) to superimpose zones of curved segments e.g. circle arc, of electrical connection tracks. Vias are pierced in an insulating resin along a direction of the stacking, and directly above spaces that are surrounded by the zones to form the vias. A wall of the vias is metallized by electrolytic growth. The stacking of the wafers is cut along cutting paths to form three-dimensional electronic modules, where the width of the cut of stacking is higher than the width of an electrode interconnecting the tracks.</p>
申请公布号 JP5621155(B2) 申请公布日期 2014.11.05
申请号 JP20080273900 申请日期 2008.10.24
申请人 发明人
分类号 H01L25/065;H01L25/07;H01L25/18 主分类号 H01L25/065
代理机构 代理人
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