| 摘要 |
PROBLEM TO BE SOLVED: To stably maintain a workpiece treatment space at a low humidity required for workpiece treatment. SOLUTION: The low-humidity treatment equipment includes dehumidifying air supply means 8, 19a for dehumidifying the workpiece treatment space 3 so as to maintain the workpiece treatment space at a low humidity by surrounding the workpiece treatment space 3 with a partition wall 2 with communication ports 4, 5 to an ambient space and supplying dehumidified air SA1 to the workpiece treatment space 3. The communication ports 4, 5 have a bell mouth structure 29 so that expansion-side openings open to the workpiece treatment space 3. COPYRIGHT: (C)2013,JPO&INPIT |
