发明名称 半導体装置及びその製造方法
摘要 <p><P>PROBLEM TO BE SOLVED: To supply a reliable circuit board at low costs. <P>SOLUTION: A substrate 1 is covered with a metal mask 100 so that a partial surface of the substrate 1 including a chip-demountable electrode 2 is exposed via an opening 101, for example. After a metal conductor is formed by an ion plating method for giving a cladding energy of 0.01 to 250 eV to an ionized cladding metal, the metal mask 100 is separated, thus forming a wiring layer 21 that comprises the metal conductor formed on the partial surface of the substrate 1. As a result, the wiring layer 21 can be directly formed on the substrate without using a photolithographic method, thus providing the highly productive and low-cost circuit board. <P>COPYRIGHT: (C)2011,JPO&INPIT</p>
申请公布号 JP5618579(B2) 申请公布日期 2014.11.05
申请号 JP20100056711 申请日期 2010.03.12
申请人 发明人
分类号 H01L23/12;H01L21/3205;H01L21/768;H01L23/522 主分类号 H01L23/12
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