发明名称 TRANSLUCENT GAS BARRIER FILM, METHOD FOR PRODUCING TRANSLUCENT GAS BARRIER FILM, ORGANIC EL ELEMENT, SOLAR CELL, AND THIN-FILM CELL
摘要 A transparent gas barrier film that has excellent gas barrier properties and includes a transparent gas barrier layer having a very low internal stress, and a method for producing the same. The transparent gas barrier film according to the present invention includes: a resin substrate (110); and a transparent gas barrier layer (120) formed over the resin substrate. The transparent gas barrier layer (120) includes at least one kind selected from the group consisting of metals and metalloids. The transparent gas barrier layer (120) includes a plurality of layers each having a density that changes continuously and periodically in the thickness direction. The change in density is either change from high density to low density or change from low density to high density.
申请公布号 EP2799225(A1) 申请公布日期 2014.11.05
申请号 EP20120861425 申请日期 2012.12.14
申请人 NITTO DENKO CORPORATION 发明人 YAMADA YASUMI
分类号 B32B9/00;B32B27/06;C23C14/32;C23C14/54;H01L31/04;H01L31/048;H01L31/049;H01L51/44;H01L51/50;H01L51/52;H01M2/02;H05B33/02;H05B33/04 主分类号 B32B9/00
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