| 摘要 |
An object characteristics measurement apparatus of the invention includes a surface acoustic wave device. The surface acoustic wave device includes: an interdigitated electrode that is formed on a first surface on a piezoelectric substrate, excites an elastic wave, and receives reflection based on the elastic wave; a reflector that has a third surface and a fourth surface between the interdigitated electrode and a second surface orthogonal to the first surface in a propagation direction of the elastic wave, the third surface being formed at a position different from that of the first surface in a normal direction of the first surface, the fourth surface connecting an end of the first surface, which is formed perpendicular to the normal direction of the first surface, to the third surface; a reaction field that is formed between the interdigitated electrode and the reflector, in which the measured object is to be loaded; and a propagator that is formed between the reflector and the second surface. The characteristics of the measured object are determined based on a surface acoustic wave that is separated from an elastic wave and a bulk wave and from a bulk wave where the elastic wave propagates along the reaction field from the interdigitated electrode, is reflected by the fourth surface, and is received by the interdigitated electrode and where the bulk wave is reflected by the second surface and is included in the surface acoustic wave received by the interdigitated electrode. |
