发明名称 金属−セラミックス接合基板の製造方法
摘要 <P>PROBLEM TO BE SOLVED: To provide a means for producing a metal-ceramics joined substrate, when a base integrated type metal-ceramics joined substrate is produced by molten metal joining, even if a base plate made of aluminum or an aluminum alloy is formed so as to surround a metal plate made of a metal having thermal conductivity higher than that of aluminum or an aluminum alloy, which prevents the formation of an intermetallic compound or a solid solution of the metal and Al, and further can prevent the diffusion between the metal and Al. <P>SOLUTION: The surface of a metallic member is thermally sprayed with ceramics to obtain a sprayed coating-coated member 16 in which the surface of the metallic member is coated with a sprayed coating, thereafter, the sprayed coating-coated member and a ceramics substrate 12 are separated from each other and are arranged within a mold 20, the molten metal of aluminum or an aluminum alloy is poured so as to be contacted with the whole face of the sprayed coating-coated member and either face of the ceramics substrate in the mold, and the molten metal is thereafter cooled and solidified. <P>COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP5619437(B2) 申请公布日期 2014.11.05
申请号 JP20100055526 申请日期 2010.03.12
申请人 发明人
分类号 H01L23/36;B22D19/00;B22D19/04;C23C4/10;C23C4/12;H01L23/12 主分类号 H01L23/36
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