发明名称 カリックス[4]アレーン組成物
摘要 <P>PROBLEM TO BE SOLVED: To provide a composition which has a low production cost and can form a pattern with high resolution and high sensitivity. <P>SOLUTION: The composition includes calix[4]arene derivatives represented by formula (1) (wherein R<SP POS="POST">1</SP>and R<SP POS="POST">2</SP>are each an alkyl group, an acetyl group or an allyl group and n is an integer of 0-3) and formula (2) (wherein R<SP POS="POST">3</SP>is the same group as R<SP POS="POST">2</SP>). <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP5618893(B2) 申请公布日期 2014.11.05
申请号 JP20110093848 申请日期 2011.04.20
申请人 发明人
分类号 G03F7/004;C07C43/188;C07C43/192;C07C69/013;C07C69/21;C08G61/02;H01L21/027 主分类号 G03F7/004
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