摘要 |
<p>The present invention aims at realizing a gas concentration estimation apparatus with versatility wherein the gas concentration estimation apparatus estimates concentration of a target component in an analyte gas by analyzing a light emitted from plasma of the analyte gas. The present invention is directed to a gas concentration estimation apparatus including: a plasma generation device that turns an analyte gas into a plasma state; and an analysis device that analyzes plasma light emitted from the plasma generated by the plasma generation device and estimates concentration of a target component in the analyte gas wherein the analysis device estimates the concentration of the target component based on luminescence intensity of a wavelength component corresponding to luminescence from a predetermined radical within the plasma light, and the predetermined radical is different in atomic structure from the target component and includes an atom or a molecule separated from the target component.</p> |