发明名称 GAS CONCENTRATION ESTIMATION DEVICE
摘要 <p>The present invention aims at realizing a gas concentration estimation apparatus with versatility wherein the gas concentration estimation apparatus estimates concentration of a target component in an analyte gas by analyzing a light emitted from plasma of the analyte gas. The present invention is directed to a gas concentration estimation apparatus including: a plasma generation device that turns an analyte gas into a plasma state; and an analysis device that analyzes plasma light emitted from the plasma generated by the plasma generation device and estimates concentration of a target component in the analyte gas wherein the analysis device estimates the concentration of the target component based on luminescence intensity of a wavelength component corresponding to luminescence from a predetermined radical within the plasma light, and the predetermined radical is different in atomic structure from the target component and includes an atom or a molecule separated from the target component.</p>
申请公布号 EP2799846(A1) 申请公布日期 2014.11.05
申请号 EP20120863370 申请日期 2012.12.26
申请人 IMAGINEERING, INC. 发明人 IKEDA, YUJI
分类号 G01N21/68;G01N21/67 主分类号 G01N21/68
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