| 摘要 |
<p>The invention relates to a substrate carrying device and a substrate carrying method utilizing the same. The substrate carrying device comprises a supporting portion for supporting substrates; an arm unit, wherein the supporting portion can be combined with the arm unit in a rotatable manner; an arm pedestal, wherein the arm unit can be combined with the arm pedestal in a rotatable manner; and a driving portion which enables the arm unit and the supporting portion to rotate so as to move the supporting portion. While the driving portion is moving the supporting portion, the supporting portion is moved in a direction opposite to a snaking direction of the supporting portion.</p> |
