基板処理ユニットおよび基板処理装置,申请号JP20130027499-传众专利搜索

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发明名称	基板処理ユニットおよび基板処理装置
摘要
申请公布号	JP5620530(B2)	申请公布日期	2014.11.05
申请号	JP20130027499	申请日期	2013.02.15
申请人		发明人
分类号	H01L21/027;B05C11/08;H01L21/304	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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