| 摘要 |
An inertial force sensor which reduces the deterioration of an angular speed detection accuracy and improves the diagnosis accuracy of fault diagnosis is provided. The inertial force sensor includes an oscillator having a driving electrode, a monitor electrode, and a detecting electrode; a driving circuit which applies a driving signal to the driving electrode to oscillate the oscillator; a detecting circuit which detects an angular speed according to a detecting signal outputted from the detecting electrode due to an inertial force; an oscillation control circuit which controls an energization amount of the driving signal according to a monitor signal outputted from the monitor electrode; and a fault diagnosing circuit which inputs a pseudo angular speed signal to the detecting circuit for fault diagnosis, wherein a filter switching circuit which switches a characteristic of a filter circuit included in the detecting circuit in fault diagnosis mode to shorten a delay time is provided. |
