| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a pellicle capable of suppressing the amount of sag by self-weight of a pellicle film as much as possible. <P>SOLUTION: In a pellicle 42 having a rectangular pellicle frame 10 to which a pellicle film 44 is attached, a plurality of linear reinforcement bodies 12 having a thickness of 100μm at maximum are contained in the pellicle film 44 and provided in a tensioned state between long sides, facing each other, of the pellicle frame 10. A method for manufacturing a pellicle film includes the steps of: coating a flat surface with a pellicle film forming solution and forming a ground layer thinner than a pellicle film to be formed; providing linear reinforcement bodies onto the ground layer in a tensioned state; and coating the ground layer with the pellicle film forming solution so as to cover the linear reinforcement bodies and forming a pellicle film with the prescribed thickness including the linear reinforcement bodies. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
