发明名称 |
METHOD FOR MANUFACTURING A MULTILAYER STRUCTURE ON A SUBSTRATE |
摘要 |
The invention relates to a method for manufacturing a multilayer strucute on a first substrate, the method including: using the first substrate made of a first material having a Young's modulus Ev and a thickness ev, and using a second substrate covered by the multilayer structure, the second substrate being made of a second material having a Young's modulus Es that is different from the Young's modulus Ev and a thickness es, the thicknesses es and ev complying, plus or minus 10%, with the relation (I); molecularly bonding the first substrate and the multilayer structure together; and removing the second substrate. |
申请公布号 |
EP2798667(A1) |
申请公布日期 |
2014.11.05 |
申请号 |
EP20120819115 |
申请日期 |
2012.12.27 |
申请人 |
COMMISSARIAT À L'ÉNERGIE ATOMIQUE ET AUX ÉNERGIESALTERNATIVES |
发明人 |
ROSSINI, UMBERTO;FLAHAUT, THIERRY;LARREY, VINCENT |
分类号 |
H01L23/00;H01L21/20;H01L21/762 |
主分类号 |
H01L23/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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