| 摘要 |
A charging apparatus that may be applied to a process of bonding a large-sized plate-shaped member as air bubbles is prevented from mixing. A charging apparatus includes a plurality of holding members (4, 5) for holding a pair of plate-shaped members (2, 3) in a state the major surface of the paired plate-shaped members (2, 3) will face each other, and a movement member (6) that causes the holding members (4, 5) to be moved towards and away from each other. The charging apparatus also includes an emission nozzle (10) adapted to be introduced between the plate-shaped members (2, 3), arranged facing each other, to emit a charging liquid (7) into the gap between the plate-shaped members (2, 3). The charging apparatus also includes a nozzle movement unit (11) for causing movement of the emission nozzle (10) in an in-plane direction of the plate-shaped members (2, 3). The charging apparatus also includes a reservoir (15) in which the charging liquid (7) is to be accumulated, and a thrust unit (13) that causes the charging liquid (7) accumulated in the reservoir (15) to be emitted via the emission nozzle (10). The charging liquid (7), emitted via the emission nozzle (10), is charged into the gap between the plate-shaped members as the liquid is contacted with the plate-shaped members (2, 3) carried in a relation of facing each other. |
