APPARATUS, HYBRID LAMINATED BODY, METHOD, AND MATERIALS FOR TEMPORARY SUBSTRATE SUPPORT

摘要

A hybrid laminated body is provided that includes a light-transmitting support, a latent release layer disposed upon the light-transmitting support, a joining layer disposed upon the latent release layer, and a thermoplastic priming layer disposed upon the joining layer. The hybrid laminated body can further include a substrate to be processed such as, for example, a silicon wafer to be ground. Also provided is a method for manufacturing the provided laminated body.