摘要 |
<p>An apparatus (1) for detecting a 3D structure of an object includes: a first laser emitter (2a) to generate a laser radiation having a first wavelength; a second laser emitter (2b) to generate a laser radiation having a second wavelength, which differs from the first wavelength; optical devices (4, 9, 10, 13, 14), of which at least one is a beam splitter to split the laser radiation of the laser emitters (2, 2a, 2b) in each case into a reference radiation (5) and an irradiating radiation (6), in which the irradiating radiation (6) collides with an object (15) to be measured, and an object radiation (21) is reflected from the object (15) and interferes with the reference radiation (5); and a detection device (12) to receive interference patterns formed from the optical devices. The laser emitters (2, 2a, 2b) are positioned in such a manner that the irradiating radiation (6) of the first laser emitter (2a) and the irradiating radiation (6) of the second laser emitter (2b) collide on the object (15) at different angles. The apparatus (1) further includes a measuring device (27) to measure two wavelengths of laser radiation of the laser emitters (2, 2a, 2b) and to influence a recording of the interference patterns.</p> |