发明名称 |
Method and system for spectrum data analysis |
摘要 |
A method and system for spectrum data analysis. The method comprises the steps of collecting a spectrum of an unknown material; providing a set of data templates; calculating weighting factors for the element data templates to minimize error in approximating the spectrum; removing one or more of the templates having negative weights in approximating the spectrum; and re-calculating an approximation of the spectrum with said one or more templates removed. Embodiments of the invention are suitable for analyzing noisy spectra having relatively few data points. |
申请公布号 |
US8880356(B2) |
申请公布日期 |
2014.11.04 |
申请号 |
US200912866697 |
申请日期 |
2009.02.06 |
申请人 |
Fei Company |
发明人 |
Corbett Daniel Roy;Gottlieb Paul;Menzies Andrew Harley;Owen Michael James |
分类号 |
G01N23/00;G01N23/207;H01J37/28 |
主分类号 |
G01N23/00 |
代理机构 |
Scheinberg & Associates, PC |
代理人 |
Scheinberg & Associates, PC ;Scheinberg Michael O.;Horvath John |
主权项 |
1. A method of spectrum data analysis, the method comprising the steps of:
directing an electron beam toward an unknown material; collecting x-rays emitted from the unknown material as a result of the electron beam impact; determining from the energies of less than 100,000 collected x-rays a spectrum of the unknown material; providing a set of element data templates, each corresponding to an x-ray spectra of a chemical element; calculate least squares weights for the element data templates in approximating the spectrum; removing one or more of the templates having negative weights in approximating the spectrum; and re-calculating an approximation of the spectrum with said one or more templates removed. |
地址 |
Hillsboro OR US |