Method and apparatus of physical property measurement using a probe-based nano-localized light source

摘要

An apparatus and method of performing physical property measurements on a sample with a probe-based metrology instrument employing a nano-confined light source is provided. In one embodiment, an SPM probe tip is configured to support an appropriate receiving element so as to provide a nano-localized light source that is able to efficiently and locally excite the sample on the nanoscale. Preferably, the separation between the tip apex and the sample during spectroscopic measurements is maintained at less than 10 nm, for example, using an AFM TR Mode control scheme.

主权项

1. An SPM including:
a probe including a cantilever and a tip, the tip positioned at a distal end of the cantilever and including a) a shaft and, b) an apex positioned adjacent to a sample; a receiving element supported by the shaft of the tip;
a source of electromagnetic wave excitation that directs electromagnetic waves toward the receiving element, the electromagnetic waves being coupled to the apex via the receiving element, and wherein the coupled electromagnetic waves at the apex yield locally enhanced excitation that interacts with the sample; anda controller that maintains a separation between the apex and the sample greater than zero nanometers and less than 100 nm during electromagnetic wave excitation.