PARTICLE BEAM MICROSCOPE.

摘要

The particle beam microscope (1) has a magnet lens (3) with an optical axis and a front pole piece (21), which is arranged in an optical path along the optical axis with a spacing before an object plane (19). An object holder is configured to hold an object (5) at an intersection point between the optical axis and the object plane. The X-ray detectors are arranged such that an elevation angle runs between a line and a center of a substrate (35-1).