Processing of nanostructured devices using microfabrication techniques

摘要

Systems and methods that incorporate nanostructures into microdevices are discussed herein. These systems and methods can allow for standard microfabrication techniques to be extended to the field of nanotechnology. Sensors incorporating nanostructures can be fabricated as described herein, and can be used to reliably detect a range of gases with high response.

主权项

1. A method of creating a microstructure incorporating nanotechnology, comprising:
forming a pattern of bottom electrodes on a substrate of the microstructure, wherein one or more regions of the pattern of bottom electrodes has a relatively high electric field gradient; applying a suspension of nanostructures in a photoresist to the microstructure; creating at least one aligned nanostructure via performing dielectrophoresis on the suspension of nanostructures in the photoresist; exposing the photoresist; and creating a top electrode deposition that covers both the nanostructure and the pattern of bottom electrodes.