| 主权项 |
1. A photosensitive composition comprising: (A) a compound capable of generating a compound represented by formula (I) upon irradiation with actinic rays or radiation:wherein R1 and R2 each independently represents a monovalent organic group, provided that at least either one of R1 and R2 has a proton acceptor functional group, R1 and R2 may combine to form a ring and the ring formed may have a proton acceptor functional group; and
X1 and X2 each independently represents —CO— or —SO2—, said compound (A) being a sulfonium salt compound of the compound represented by formula (I) or an iodonium salt compound of the compound represented by formula (I); (B) a compound capable of generating an acid upon irradiation with actinic rays or radiation; and (C) a resin capable of decomposing under an action of an acid to increase the solubility of the resin (C) in an alkali developer, wherein: the proton acceptor functional group has a partial structure selected from the group consisting of a crown ether structure, an aza-crown ether structure, a tertiary amine structure, a secondary amine structure, a primary amine structure, a pyridine structure, an imidazole structure, a pyrazine structure and an aniline structure; when the proton acceptor functional group contains a tertiary amine, a secondary amine, or a primary amine, as a partial structure, a carbon atom connected to a nitrogen atom in the tertiary amine, the secondary amine, or the primary amine connects only to one or more hydrogen, carbon, and/or oxygen atoms; the resin (C) has no aromatic group; and the compound (A) capable of generating a compound represented by formula (I) upon irradiation with actinic rays or radiation is a compound represented by the following formula (A1) or (A2): wherein R201, R202 and R203 each independently represents an organic group, provided that when two members out of R201 to R203 are both an alkylene group, the two alkylene groups may combine to form a ring structure, and the ring may contain an oxygen atom, a sulfur atom, an ester bond, an amide bond or a carbonyl group; X represents an anion of the compound represented by formula (I); and R204 and R205 each independently represents an aryl group, an alkyl group or a cycloalkyl group. |
