| 发明名称 | Lithographic apparatus, and motor cooling device | ||
| 摘要 | A lithographic device includes a cooling device for removing heat from a motor. The cooling device has a cooling element provided in thermal contact with at least part of the motor. The cooling device further has a cooling duct assembly with a supply duct to supply a cooling fluid to the cooling element, and a discharge duct to discharge the cooling fluid from the cooling element. A pump causes the cooling fluid to flow through at least part of the cooling duct assembly. A flow control device controls a flow rate of the cooling fluid through at least part of the cooling duct assembly, to maintain a predetermined average temperature of the cooling fluid in the cooling element. | ||
| 申请公布号 | US8879044(B2) | 申请公布日期 | 2014.11.04 |
| 申请号 | US201113050344 | 申请日期 | 2011.03.17 |
| 申请人 | ASML Netherlands B.V. | 发明人 | Auer Frank |
| 分类号 | G03B21/16;H02K5/20;G03F7/20 | 主分类号 | G03B21/16 |
| 代理机构 | Sterne, Kessler, Goldstein & Fox P.L.L.C. | 代理人 | Sterne, Kessler, Goldstein & Fox P.L.L.C. |
| 主权项 | 1. A cooling device for removing heat from a motor, the cooling device comprising: a cooling element provided in thermal contact with at least part of the motor; a cooling duct assembly comprising a supply duct configured to supply a cooling fluid to the cooling element, a discharge duct configured to discharge the cooling fluid from the cooling element, and a recirculating duct configured to connect the discharge duct and the supply duct to each other, the recirculation duct having a first pump; a second pump configured to cause the cooling fluid to flow through at least part of the cooling duct assembly; and a flow control device configured to control a flow rate of the first pump and the second pump, so as to maintain a predetermined average temperature of the cooling fluid in the cooling element. | ||
| 地址 | Veldhoven NL | ||