| 摘要 |
<p>The present invention relates to an apparatus for attaching substrates capable of easily ensuring absolute horizontality of absorption jigs absorbing both the upper and the lower substrate to perform a correct substrate attachment work. The apparatus for attaching the substrates according to the present invention comprises an upper substrate attachment part for absorbing the upper substrate to attach the upper substrate in a fixed state; and a lower substrate attachment part for absorbing the lower substrate to attach the lower substrate in a fixed state. The upper substrate attachment part includes an upper substrate absorption jig for absorbing and fixating a rear surface of the upper substrate; a horizontality sensing sensor installed on a rear surface of the upper substrate absorption jig for sensing horizontality of the upper substrate absorption jig; and a horizontality adjustment for adjusting the horizontality of the upper substrate absorption jig. The lower substrate attachment part includes a lower substrate absorption jig for absorbing and fixating a rear surface of the lower substrate; a parallelism transfer maintaining part coupled and installed at a lower part of the lower part substrate absorption jig, receiving the horizontality of the upper substrate absorption jig and maintaining the horizontality of the lower substrate absorption jig at the same with that of the upper substrate absorption jig; and a lifting and dropping part connected and installed to a lower part of the parallelism transfer maintaining part for lifting and dropping the parallelism transfer maintaining part and the lower substrate absorption jig.</p> |
