发明名称 Crucible for evaporator source and Apparatus for deposition having the same
摘要 <p>Provided are a crucible for an evaporator source and a deposition device having the crucible for an evaporator source. The crucible for an evaporator source according to an embodiment of the present invention includes a tubular heating tube unit in which a hollow unit penetrated from the upper end to the lower end is installed; and an expandable corrugated unit in which evaporation materials are accommodated in the inside, the upper end is connected to the lower end of the heating tube unit, and the lower end is closed. The uneven distribution of heat in the evaporation materials is suppressed by heating the upper end of the evaporation materials filled in the crucible for the evaporator source. The uniform evaporation of the evaporation materials can be induced.</p>
申请公布号 KR101458528(B1) 申请公布日期 2014.11.04
申请号 KR20120151465 申请日期 2012.12.21
申请人 发明人
分类号 C23C14/24 主分类号 C23C14/24
代理机构 代理人
主权项
地址