发明名称 |
SURFACE-EMITTING LASER ELEMENT, SURFACE-EMITTING LASER ARRAY, OPTICAL SCANNING APPARATUS, IMAGE FORMING APPARATUS, AND METHOD OF MANUFACTURING SURFACE-EMITTING LASER ELEMENT |
摘要 |
<p>A method of manufacturing a surface-emitting laser element having a light-emitting mesa structure with an emitting area including a high-reflectance portion and a low-reflectance portion includes forming a layered body that includes a lower reflecting mirror, a cavity structure, and an upper reflecting mirror on a substrate; forming a first area on an upper surface of the layered body; forming a second area having the same size as the first area on the upper surface of the layered body; forming a light-emitting mesa structure and a monitoring-mesa structure by etching the first area and the second area, respectively; forming a confinement structure including a current passage area surrounded by an oxide in the light-emitting mesa structure and the monitoring-mesa structure; and measuring the size of the current passage area of the monitoring-mesa structure.</p> |
申请公布号 |
KR101438262(B1) |
申请公布日期 |
2014.11.03 |
申请号 |
KR20117028816 |
申请日期 |
2010.05.26 |
申请人 |
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发明人 |
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分类号 |
G03G15/00;H01S5/183;H04N1/04 |
主分类号 |
G03G15/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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