| 摘要 |
<p>The present invention discloses an improved line scan device and a method, and fine pattern detection system and a method having the same. The line scan device according to the present invention comprises: CCD; a sensor unit provided on the lower part of the CCD and comprising a plurality of first lenses to adjust a focal distance; an object unit provided on the lower part of the sensor unit and having a plurality of second lenses; a beam splitter provided between the first lens unit and the object unit; and a lighting unit integrally provided to be detachable from the beam splitter. The lighting unit provides predetermined width of parallel line beams to the beam splitter whereby the beam splitter forms coaxial beams which an incident beam and a reflective beam are parallel on a panel.</p> |
