| 摘要 |
<p>Disclosed are a rotation shaft module and a deposition device. The rotation shaft module comprises a first shaft having a fluid pipe, which starts from the side end in one end and which is extended from the inside in the longitudinal direction and then is extended to the other side in the other end; a sealing sleeve, which has a hollow unit so that the first shaft can penetrate the same and one end of the fluid pipe can be located inside the same, and which has a fluid passage from the outside to the hollow unit and has the first shaft inserted into the hollow unit to be rotatable; a connection groove unit, which connects one end of the fluid pipe and the fluid passage by being depressed into one or more of the outer surface of the first shaft and the inner surface of the hollow unit along the outer periphery of the first shaft; and a seal member, which is interposed between the outer surface of the first shaft and the inner surface of the hollow unit in the upper and lower parts of the connection groove unit so that the connection groove unit can be sealed. The rotation shaft module can simplify a fluid circulating structure between the outer and inner parts of the vacuum chamber under the vacuum condition of a vacuum chamber.</p> |
