发明名称 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
摘要 <p>The purpose of the present invention is to provide a semiconductor device capable of forming a conductive layer having no defect on a substrate surface, and a method of manufacturing the semiconductor device. The semiconductor device includes a substrate (10) which is hexagonal crystal and has a (0001) surface, and multiple conductive layers (12) formed on the surface of the substrate. The conductive layers have a first conductive layer (14) of a crystal structure which has no plane surface which has symmetry equal to atom arrangement in the substrate surface of the substrate, and a second conductive layer (16) of a crystal structure which is formed on an upper part of the first conductive layer and having at least one plane surface having symmetry equal to atom arrangement in the substrate surface of the substrate. The second conductive layer is poly crystal having a diameter of 15μm or less.</p>
申请公布号 KR20140127155(A) 申请公布日期 2014.11.03
申请号 KR20140043990 申请日期 2014.04.14
申请人 MITSUBISHI ELECTRIC CORPORATION 发明人 MAEDA KAZUHIRO;SHIGA TOSHIHIKO
分类号 H01L21/28 主分类号 H01L21/28
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