PACKET RELAY AND TRANSMISSION APPARATUS FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT

摘要

The present invention relates to a device for relaying packets transmitted by using SECS protocol, and a packet transmission device for semiconductor manufacturing equipment. The device for relaying packets classifies only a packet complying with SECS protocol or passing through a specific port among packets transmitted through a network as a valid packet and blocks the rest of the packets and as a result, improves security in the network and extremely limits infiltration of viruses, thereby facilitating the operation of manufacturing equipment. The device for relaying packets comprises: a network interface module that receives a packet from the outside or outputs a packet to the outside through network communications; and a control module that analyzes packets inputted through a network, allows a valid SECS packet complying with SECS protocol to pass through, and blocks a packet complying with a predetermined invalid protocol.