ADJUSTABLE BEAM SPOT SCANNING ELECTRON MICROSCOPE AND MEASURED USING THE SAME METHOD

摘要

The present invention relates to a scanning electron microscope capable of adjusting a beam spot and a measurement method using the same. The scanning electron microscope (SEM) has an electro-magnetic in an electron beam furnace moving an electron beam source of the SEM to a specimen to irradiate by controlling with a linear electron beam in which the electron beam spot, irradiated on the specimen, has a length and a width different from each other. When the measurement beam is output from the electron beam source, a control unit controls an applied voltage of the electro-magnetic to control the ratio and direction of the electron beam spot.