| 摘要 |
The present invention relates to a graphic user interface of a three-dimensional substrate inspecting apparatus. The graphic user interface comprises an actually-measured screen display area which displays a three-dimensional actually-measured screen of an object to be inspected based on three-dimensional actually-measured data of the object to be inspected on a substrate; and a measurement setting display area presenting a measurement of the object to be inspected on CAD data, a measurement of an object to be inspected on the three-dimensional actually-measured data and a suggested measurement of the object to be inspected based on the three-dimensional actually-measured data. In the actually-measured screen display area, a first contour line of the object to be inspected based on the measurement of the object to be inspected on CAD data and a second contour line of the object to be inspected based on the three-dimensional actually-measured data are displayed to be overlapped on a three-dimensional actually-measured screen of the object to be inspected. |
