发明名称 POLISHING PAD
摘要 <p>A method for manufacturing a polishing pad that has high level of optical detection accuracy and is prevented from causing slurry leak from between the polishing region and the light-transmitting region includes preparing a cell-dispersed urethane composition by a mechanical foaming method; placing a light-transmitting region at a predetermined position on a face material or a belt conveyor, continuously discharging the cell-dispersed urethane composition onto part of the face material or the belt conveyor where the light-transmitting region is not placed; placing another face material or belt conveyor on the discharged cell-dispersed urethane composition; curing the cell-dispersed urethane composition to form a polishing region including a polyurethane foam, so that a polishing sheet is prepared; applying a coating composition containing an aliphatic and/or alicyclic polyisocyanate to one side of the polishing sheet and curing the coating composition to form water-impermeable film; and cutting the polishing sheet.</p>
申请公布号 KR101455218(B1) 申请公布日期 2014.10.31
申请号 KR20107015876 申请日期 2009.02.26
申请人 发明人
分类号 B24B37/24;C08G18/65;C08G101/00;H01L21/304 主分类号 B24B37/24
代理机构 代理人
主权项
地址