THIN FILM TYPE PZT SENSOR MANUFACTURING METHOD FOR HARD DISC

摘要

Disclosed is a method for manufacturing a thin film PZT sensor for a hard disk. The method for manufacturing the thin film PZT sensor for the hard disk includes the steps of: forming a buffer layer on the upper side of a wafer; depositing the thin film PZT on the upper side of the buffer layer; grinding the surface of the thin film PZT; depositing a seed layer on the surface of the thin film PZT, and patterning an electrode through a photo process; forming a first electrode pad and a second electrode pad by electroplating; removing an unnecessary part through a metal wet etching process; polishing the rear surface of the wafer; forming the thin film PZT chip by cutting the wafer with a preset size; and testing the performance of the thin film PZT chip.