摘要 |
<p>PROBLEM TO BE SOLVED: To provide a piezoelectric element in which peeling of a surface electrode is prevented, and to provide a method of manufacturing the same.SOLUTION: A piezoelectric actuator element 1 includes: a piezoelectric layer 11; and a surface electrode 21 having an active part 22 provided on a surface 11a of the piezoelectric layer 11 and activating the piezoelectric layer 11, and a connection part 23 connected to external wiring. The connection part 23 is embedded into the piezoelectric layer 11 and has a salient 23a protruding on a side of the piezoelectric layer 11. In the piezoelectric actuator element 1 like this, the bonding strength between the connection part 23 of the surface electrode 21 and the piezoelectric layer 11 is enhanced by the salient 23a, thereby preventing peeling of the surface electrode 21 at the connection part 23.</p> |