| 发明名称 |
LASER APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS |
| 摘要 |
A laser apparatus may include a master oscillator configured to output a pulse laser beam, an amplifier disposed in a light path of the pulse laser beam, a wavelength selection element disposed in the light path of the pulse laser beam and configured to transmit light of a selection wavelength at higher transmittance than transmittance of light of other wavelengths, and a controller configured to change the selection wavelength of the wavelength selection element. |
| 申请公布号 |
US2014319388(A1) |
申请公布日期 |
2014.10.30 |
| 申请号 |
US201414215492 |
申请日期 |
2014.03.17 |
| 申请人 |
GIGAPHOTON INC. |
发明人 |
MORIYA Masato;WAKABAYASHI Osamu |
| 分类号 |
H05G2/00;H01S3/10 |
主分类号 |
H05G2/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A laser apparatus comprising:
a master oscillator configured to output a pulse laser beam; an amplifier disposed in a light path of the pulse laser beam; a wavelength selection element disposed in the light path of the pulse laser beam and configured to transmit light of a selection wavelength at higher transmittance than transmittance of light of other wavelengths; and a controller configured to change the selection wavelength of the wavelength selection element. |
| 地址 |
Oyama JP |
