| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a vacuum system capable of obtaining a very low pressure, in particular, in a high vacuum region by using an elastomer seal.SOLUTION: In a vacuum system having at least one vacuum pump and at least one receiving portion, a separable connecting portion is disposed between the vacuum pump and the receiving portion, and at least one elastomer seal is disposed toward an atmospheric air side, and at least one gap seal is disposed in a direction of a vacuum side to seal the connecting portion. At least one suction passage and/or at least one suction opening are formed between the elastomer seal and the gap seal.</p> |
