CHARGED PARTICLE BEAM DRAWING APPARATUS AND CHARGED PARTICLE BEAM DRAWING METHOD

摘要

A charged particle beam drawing apparatus according to one embodiment of the present invention comprises a load lock chamber provided for introducing a target object from the outside and capable of switching an atmosphere state and a vacuum state, a transfer chamber arranged so as to be able to communicate with the load lock chamber and transferring the target object, a soaking chamber arranged so as to be able to communicate with the transfer chamber and having a temperature adjustment container for housing the target object therein and controlling a temperature of the target object with radiation and a temperature adjustment part for controlling a temperature of the temperature adjustment container, and a drawing chamber arranged so as to be able to communicate with the transfer chamber and drawing on the target object at a constant temperature.

主权项

1. A charged particle beam drawing apparatus comprising:
a load lock chamber provided for introducing a target object from the outside and capable of switching an atmosphere state and a vacuum sate; a transfer chamber arranged so as to be able to communicate with the load lock chamber and transferring the target object; a soaking chamber arranged so as to be able to communicate with the transfer chamber and having a temperature adjustment container for housing the target object therein and controlling a temperature of the target object with radiation, and a temperature adjustment part for controlling a temperature of the temperature adjustment container; and a drawing chamber arranged so as to be able to communicate with the transfer chamber and drawing on the target object at a constant temperature.