EL DISPLAY DEVICE PRODUCTION METHOD

摘要

An EL display device production method wherein a constitutive component of a panel unit is film-deposited in a vacuum atmosphere, wherein a step of having a substrate be kept in a waiting state in transfer from a vacuum atmosphere to an ambient atmosphere after the constitutive component of the panel unit has been film-deposited on the substrate has a first intake period (T1) for gradually introducing an intake gas from a first vacuum atmosphere to a second vacuum atmosphere having a lower degree of vacuum than the first vacuum atmosphere, and a second intake period (T2) for introducing an intake gas from the second vacuum atmosphere to the ambient atmosphere, the first intake period T1 being set to be longer in time than the second intake period T2.