摘要 |
<p>PROBLEM TO BE SOLVED: To provide an amorphous carbon film having a sufficient holding power capable of immobilizing onto a layer comprising a diamond-like carbon film (amorphous carbon film) provided on a substrate, a layer comprising a material performing a condensation reaction with a hydroxy group on the surface of the film, and having uniformity of the holding power.SOLUTION: A layer comprising an amorphous carbon film is allowed to contain Si and O, to thereby improve adhesion durability and uniformity of a coupling state of a layer comprising a material performing a condensation reaction with a hydroxy group. Especially by using a fluorine-based silane coupling agent, high functions such as water repellency-oil repellency, abrasion resistance, chemical resistance, low friction or non-adhesiveness can be imparted.</p> |