<p>An electrostatic chuck includes a heater and an electrode disposed on the heater. The electrostatic chuck also includes an insulator layer and coating disposed on the insulator, where the coating is configured to support an electrostatic field generated by the electrode system to attract a substrate thereto.</p>
申请公布号
WO2014176093(A1)
申请公布日期
2014.10.30
申请号
WO2014US34360
申请日期
2014.04.16
申请人
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
发明人
BLAKE, JULIAN G.;STONE, DALE K.;STONE, LYUDMILA;SCHRAMEYER, MICHAEL
