| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a microscope system capable of automatically detecting the position of the focus of an optical system relative to the desired region of an object to be observed and to provide a focus position detection method and a focus position detection program.SOLUTION: Light emitted from a laser light source is irradiated on the object to be detected, while being condensed and the light reflected by the object to be observed is guided to a light-receiving element through an objective lens. Pixel data corresponding to a plurality of pixels is outputted based on the output signal of the light-receiving element. An evaluation value based on a plurality of pixel data is set so as to be smaller than an output upper limit value Emax and larger than a multiplication value Enl between a noise level and the number of pixels for calculating the evaluation value. The evaluation value is calculated at a set gain, while moving the objective lens in a direction upward from the present position zs1. Whenever the evaluation value reaches the output upper limit value Emax, the gain is decreased by a fixed amount. The position of the objective lens in the Z-direction when the evaluation value reaches a peak is detected.</p> |
