| 摘要 |
<p>A method and a system for evaluating a stripping capability of a stripping device and an evaluation member used in the method and system, so as to implement evaluation and monitoring of the stripping capability of the stripping device. The method comprises: performing photoresist stripping processing on at least two test blocks, comprising different curing degree values, of a photoresist (43) by using a stripping device (501); detecting stripping effects of the test blocks after stripping processing (502); and according to curing degree values and stripping effects of the test blocks of the photoresist (43), determining a stripping capability level of the stripping device (503). The evaluation system comprises a photoresist stripping module (601) and an evaluation module (602). An evaluation member used for evaluating a stripping capability of a stripping device comprises at least two test blocks, each test block is formed of a substrate (42) and a photoresist (43) coated on the substrate (42), and each test block of the photoresist (43) has a different curing degree value.</p> |
