MICROMACHINED OXYGEN SENSOR AND METHOD OF MAKING THE SAME

摘要

The design and manufacture method of an oxygen concentration sensor made with silicon micromachining (a.k.a. MEMS, Micro Electro Mechanical Systems) process for applications of oxygen measurement with fast response time and low power consumption is disclosed in the present invention. The said silicon oxygen concentration sensor operates with an yttrium stabilized zirconia oxide amperometric cell supported on a membrane made of silicon nitride with a heat isolation cavity underneath or a silicon nitride membrane with silicon plug for mechanical strength enforcement.

主权项

1. A micromachined oxygen sensor with net mesh structure electrodes comprising:
a silicon substrate; a suspending membrane on the silicon substrate with a micromachined cavity underneath; a heating element thermistor being connected to a temperature elevation driving circuit and disposed on top of the suspending membrane; a temperature sensing thermistor being surrounding the heating element thermistor in close proximity and connected to the temperature elevation driving circuit as a temperature measurement feedback to the temperature driving circuit for the heating element thermistor; a solid electrolyte formed by a yttrium stabilized zirconia oxide layer and disposed on top of the suspending membrane; two net mesh structure electrodes which are formed by a platinum layer and disposed on top of the yttrium stabilized zirconia oxide; and two wire bonding pads which are formed by a gold metal layer and patterned on top of the yttrium stabilized zirconia oxide layer.