发明名称 |
ION BEAM DEVICE |
摘要 |
An ion beam device according to the present invention includes a gas field ion source (1) including an emitter tip (21) supported by an emitter base mount (64), a ionization chamber (15) including an extraction electrode (24) and being configured to surround the emitter tip (21), and a gas supply tube (25). A center axis line of the extraction electrode (24) overlaps or is parallel to a center axis line (14A) of the ion irradiation light system, and a center axis line (66) passing the emitter tip (21) and the emitter base mount (64) is inclinable with respect to a center axis line of the ionization chamber (15). Accordingly, an ion beam device including a gas field ion source capable of adjusting the direction of the emitter tip is provided. |
申请公布号 |
US2014319370(A1) |
申请公布日期 |
2014.10.30 |
申请号 |
US201414328754 |
申请日期 |
2014.07.11 |
申请人 |
HITACHI HIGH-TECHNOLOGIES CORPORATION |
发明人 |
SHICHI Hiroyasu;MATSUBARA Shinichi;SAHO Norihide;YAMAOKA Masahiro;ARAI Noriaki |
分类号 |
H01J27/02;H01J37/26 |
主分类号 |
H01J27/02 |
代理机构 |
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代理人 |
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主权项 |
1. An ion beam device comprising:
a gas field ion source, including a vacuum chamber, a vacuum exhaust mechanism, an emitter tip that composes a needle-shaped anode, an extraction electrode that composes a cathode in the vacuum chamber, and a cooling mechanism of the emitter tip, for supplying gas molecules to a vicinity of a distal end of the emitter tip and ionizing the gas molecules with an electric field at the distal end of the emitter tip; an ion beam device main body including a lens system which focuses an ion beam extracted from the emitter tip, a sample chamber incorporating a sample, and a secondary particle detector which detects secondary particles released from the sample; and a mount which supports the ion beam device main body, wherein a vibration proofing mechanism is arranged in a heat transmission path for transmitting heat generated in the cooling mechanism from the cooling mechanism to the emitter tip in the vacuum chamber. |
地址 |
Tokyo JP |